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The design procedures were discussed in detail for a normal incident chirped Mo/Si multilayer mirror with Group Delay Dispersion (GDD) of −3600 as 2 in the wavelength region of 13–17nm. The GDD was calculated using an analytical approach by fitting the optical constants of the coating materials in the wavelength range of 12.8–17.2nm, respectively. The final structure of the chirped mirror...
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