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Thin films of barium titanate (BTO) of 200nm thickness, derived from an alkoxide–carboxylate sol–gel process, were deposited on Pt/Ti and SrRuO 3 /ZrO 2 –8%Y 2 O 3 coated Si wafers. Films with a dense columnar microstructure were obtained by repeated deposition of thin amorphous layers from low-concentrated sols, and crystallization at 800°C. This method added 10nm...
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