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Planar-type potentiometric CO2 gas sensors using thermal evaporated Li3PO4 thin film as the solid electrolyte were fabricated. Al2O3 plates with rough and smooth surfaces were used as the substrates of the sensors. X-ray diffraction analysis, atomic force microscope and scanning electron microscope were used to characterize the Li3PO4 films. The sensing properties were investigated in the range of...
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