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In this work, an ultra-high vacuum reactive evaporation procedure has been tested and optimized for the growth of TiN thin films, throwing very good results both in composition of the TiN layers and secondary emission yield values and performance. Stoichiometry and composition are analyzed by means of X-ray photoemission spectroscopy which, together with the secondary electron emission measurements,...
A versatile data acquisition and control system (DACS) of general application in physical vapor deposition equipment for thin films growth has been designed and developed. Based on a common and inexpensive hardware, a modular conception of the software allows the system to be easily adapted to control a variety of devices and therefore to be used for a number of applications with very light adjustments...
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