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This paper studied the relationship between the ratio of LiNbO3 inversion layer plate and its thickness, annealing time, temperature. Two groups of Y-36°LiNbO3 plate with different thickness between 100 to 500µmand 60 to 200µm were annealed at 1130°C and 1140°C respectively with different time. The inversion layer ratio of the inversion layer ratio of these Y-36° LiNbO3 inverted plates was measured...
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