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This paper presents an on-chip miniaturized MEMS tunable laser, with a 3-dimensional micro coupling system to improve the coupling efficiency and side mode suppression radio. The prototype is fabricated on an SOI wafer by DRIE process. It obtains a coupling efficiency as high as 76.5%. It offers an improved tuning over a range of 48 nm. Compared with other hybrid-integrated tunable lasers, the compact...
This paper reports a 3-dimensional (3D) micro-optical coupling system for improving coupling efficiency in the Littrow configured micro-electro-mechanical system (MEMS) tunable lasers. In the coupling system, an optical fiber acts as a rod lens for light convergence in the vertical plane, while a deep-etched silicon parabolic mirror confines the light in the horizontal plane. Compared with previous...
This paper reports an integrated injection-locked laser constructed using microelectromechanical systems (MEMS) technology, which achieves a large wide locking range of 43 nm with an average SMSR of 32 dB.
This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers . The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching....
This paper reports a new design of MEMS variable optical attenuator (VOA) that makes use of a pair of parabolic mirrors as the retro-reflector in the horizontal plane and a normal fiber as the rod lens to focus in the vertical plane. It is advantageous over the conventional co-axial VOAs since it allows the fibers to be arranged in parallel and is thus convenient for the packaging. The parabolic mirrors...
This paper reports a micromachined reflective-type MEMS power regulator (PR) for optical networks. The PR consists of an improvingly designed variable optical attenuator (VOA), which has superior performance as compared with the conventional flat-mirror reflection-type and shutter-type VOAs. It uses an elliptical mirror as the movable reflector. It achieves a large attenuation range at low insertion...
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