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This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be...
This letter presents a design of a microelectromechanical systems variable optical attenuator (VOA) that employs a pair of parabolic mirrors as the retro-reflector, which has obtained a linear relationship over a 62-dB range between the attenuation (in decibels) and the mirror rotation angle (in degrees). The insertion loss measures 0.6 dB thanks to the three-dimentional optical coupling design. The...
This paper reports a new design of MEMS variable optical attenuator (VOA) that makes use of a pair of parabolic mirrors as the retro-reflector in the horizontal plane and a normal fiber as the rod lens to focus in the vertical plane. It is advantageous over the conventional co-axial VOAs since it allows the fibers to be arranged in parallel and is thus convenient for the packaging. The parabolic mirrors...
This paper reports a micromachined reflective-type MEMS power regulator (PR) for optical networks. The PR consists of an improvingly designed variable optical attenuator (VOA), which has superior performance as compared with the conventional flat-mirror reflection-type and shutter-type VOAs. It uses an elliptical mirror as the movable reflector. It achieves a large attenuation range at low insertion...
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