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Much of the early research that established MOVPE was done with simple, single-wafer systems. Uniformity and reproducibility were not show-stoppers - developing the precursors, growth processes and device fabrication techniques were more important. This situation has changed so that now the emphasis is on lower cost devices opening new applications or replacing older technologies. In this paper we...
The market for compound semiconductor based devices, while much smaller than silicon based devices, continues to expand. Several types of products have now reached the stage of significant manufacturing volumes, including light-emitting diodes (LEDs), laser diodes (LDs), solar cells and photocathodes. Electronic devices, such as HEMTs and HBTs, are also increasing in volume to fill a need in the cellular...
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