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In this paper, we present a cost-effective 28 nm CMOS technology for low power (LP) applications based on a high-k, single-metal-gate-first architecture. We report raw gate densities up to 4200 kGate/mm2, and, using the ARM Cortex-R4F as a reference, we report achievement of an overall 2.4x area reduction in 28 nm from 45 nm technology. Our high-density SRAM bit-cell (area= 0.120mm2) has a demonstrated...
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