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One of the competitive solutions to expand the function of microelectromechanical system (MEMS) is the integration of piezoelectric lead zirconate titanate (PZT) thin films for device self-actuation at low driving voltage, device self-sensing with low power consumption, as well as for energy harvesting. However, up-to-date, difficulties still exist not only in PZT film preparation but also in PZT...
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