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We analyzed the incorporation of C atoms into a ternary alloy Ge1−x−ySnxCy epitaxial film on Ge substrates on a sub-nanometer scale by using atom probe tomography. Periodic atom distributions from individual (111) atomic planes were observed both in the Ge1−x−ySnxCy film and at the Ge substrates. Sn/C atoms had non-uniform distributions in the film. They also demonstrated a clear positive correlation...
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