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In this study, approximately 20nm thick compact layers of TiOx with varied components are deposited by physical vapor deposition. The performance of these layers in solar cells is investigated. The TiOx compact layers consist of T1 (with Ti0, Ti2+, Ti3+, and Ti4+), T2 (with Ti3+ and Ti4+), and T3 (with Ti4+). Results show that the optimum compact layer is T1, which exhibits an approximately 61% enhancement...
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