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In this work, the dependence of piezoelectric coefficients (PE) on the size of artificial fabricated ZnO micropillars on Si substrate is investigated. ZnO full film is grown with c-axis orientation and an average grain size of 20 nm at a substrate temperature of 500 °C by pulsed laser ablation. The micropillars with the size range of 1.5 to 7 μm are formed by top-down semiconductor device processing...
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