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The recent progress in HAXPES combined with Inelastic Background Analysis makes this method a powerful, non-destructive solution to get quantitative information on deeply buried layers and interfaces at depths up to 70nm. However, we recently highlighted the need for carefully choosing the scattering cross-sections in order to accurately describe the transport of photoelectrons through a complex overlayer...
Inelastic background analysis of HAXPES spectra was recently introduced as a powerful method to get access to the elemental distribution in deeply buried layers or interfaces, at depth up to 60nm below the surface. However the accuracy of the analysis highly relies on suitable scattering cross-sections able to describe effectively the transport of photoelectrons through overlayer structures consisting...
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