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An improvement to the previously proposed adaptive Canny optimization technique for scanning electron microscope image colorization is reported. The additional feature, called pseudo‐mapping technique, is that the grayscale markings are temporarily mapped to a set of pre‐defined pseudo‐color map as a mean to instill color information for grayscale colors in chrominance channels. This allows the presence...
A new and robust parameter estimation technique, named image noise cross‐correlation, is proposed to predict the signal‐to‐noise ratio (SNR) of scanning electron microscope images. The results of SNR and variance estimation values are tested and compared with nearest neighborhood and first‐order interpolation. Overall, the proposed method is best as its estimations for the noise‐free peak and SNR...
This article focuses on the localization of burn mark in MOSFET and the scanning electron microscope (SEM) inspection on the defect location. When a suspect abnormal topography is shown on the die surface, further methods to pin‐point the defect location is necessary. Fault localization analysis becomes important because an abnormal spot on the chip surface may and may not have a defect underneath...
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