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A kind of multilayer ceramic capacitors (MLCCs) has been verified to have good micro‐actuating properties, thus making them good candidates for nano‐positioning. In this paper, we successfully employed the MLCCs as lateral scanners for a tripod scanning stage. The MLCC‐based lateral scanners display hysteresis under 1.5% and a nonlinearity less than 2% even with the simplest open‐loop voltage drive...
This paper focuses on the design of the optimal scanning mode for the family of scanning probe microscopes. Based on different values of the maximum acceleration (deceleration) rate and maximum speed of X‐ and Y‐ axes of the mechanical scanner encountered in practice due to different mechanical design and loads, the design procedure of the optimal fast scanning mode is presented, which is found to...
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