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A “capacitive-piezo” transducer that separates a piezoelectric resonator from its electrodes via small gaps to eliminate resonator-to-electrode loss while maintaining strong electromechanical coupling, has enabled demonstration of a 50-MHz wine-glass disk (WGD) resonator array with Q=12,748. This is higher than exhibited by any sputtered thin-film AlN resonator measured to date at any frequency and...
Quality factors (Q's) greater than 10,000 and higher than reported for any other sputtered AlN d31-piezoelectric micromechanical resonator have been demonstrated for the first time using an energy sharing mechanical circuit that mechanically couples two electrode-equipped AlN resonators with several electrode-less ones. The key enablers behind the described Q increase are 1) removal of metal electrodes...
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