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Temperature dependent conductivities, surface morphologies, defects and antimony valence state of antimony doped tin oxide (ATO) films were investigated. Much higher conductivity is found for the film calcined at 600 °C than 400 °C due to enhancement of Sb5+ ratio and removal of grain boundaries, vacancies and interstitial dopants; the conductivity increases slightly for the film calcined at 800 °C...
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