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A sensitive chip with ultralow dielectric loss based on Mn doped PMNT (71/29) has been proposed for high-end pyroelectric devices. The dielectric loss at 1kHz is 0.005%, one order lower than the minimum value reported so far. The detective figure of merit (Fd) is up to 92.6×10−5Pa−1/2 at 1kHz and 53.5×10−5Pa−1/2 at 10Hz, respectively. In addition, an inverted pyramid suspending architecture for supporting...
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