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The influence of the total thickness (periods of AlN/GaN SLs) of AlN/GaN superlattices (SLs) buffer on the static electrical properties of AlGaN/GaN HFETs is study for the purpose of improving device's breakdown voltage (BV) and reducing its on-resistance (RON). It is found that for top-GaN layer with a constant thickness of lμm, a proper thickness of AlN/GaN SLs buffer (such as 2.5 μm with 100 period...
AlGaN back barrier with different thickness is used in AlGaN/GaN high electron mobility transistors (HEMTs) to evaluate the device performances. It shows that a proper AlGaN back barrier thickness (tbb ∼100 nm) is beneficial for obtaining low leakage current and high Ion/Ioff ratio of approximately 108. While further increasing the AlGaN thickness can deteriorate the device performances because of...
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