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There are many excellent film properties of Titanium Nitride, such as high hardness, high corrosion resistance, good conductivity, low friction coefficient and a bright, golden color. In the past couple of years, it has been always used as barrier layer to inhibit diffusion of Al and Cu. In the most advance technology nodes, such as 20 nm, 16 nm and below, the metal hard mask (MHM) layer is necessary...
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