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We studied planarization of carbon overcoat by gas cluster ion beam (GCIB) for discrete track magnetic disks. We fabricated discrete tracks with variant pitches by focused ion beam on a 30-nm-thick carbon overcoat deposited on magnetic disks, and we planarized them with an Ar GCIB using lateral sputtering effect. It was found that planarization by GCIB was more effective for lower wavelengths than...
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