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The microcavity plasma array has been developed by J.G. Eden and co-workers as an efficient light source [1]. This device consists of a silicon wafer with a matrix of inverse pyramidal cavities of the size of a few ten micro meters. The structure is covered by dielectrics. A nickel grid embedded inside the dielectrics acts as counter electrode. The discharge is driven by a triangular voltage at a...
The dynamics of electrons plays an important role for the behavior of radio-frequency driven discharges, particularly at high pressures. The electron dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work we study a radio-frequency driven atmospheric pressure plasma jet which is frequently employed as an efficient plasma sources for surface modification. We concentrate...
Radio frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure, e.g. in the increasing field of biomedical applications. The radio-frequency driven micro-scaled atmospheric pressure plasma jet (μAPPJ) is a particular variant of that concept. In this work, the characteristics of a μAPPJ operated with a helium-oxygen...
To increase the efficiency of the plasma assisted material processing with help of the capacitively coupled plasma discharge frequency of the driven field and spatial size of the modern devices tend to higher values. This can lead to a stronger influence of the electromagnetic effects, which in turn can affect the plasma uniformity, one of the most important parameters in such a technology. To assess...
The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, separated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven...
An increasing number of different microplasma sources were developed over the last years. These sources differ in the underlying application, hence different types of geometry and discharge configuration, DC or RF discharges and the used chemistry exist. The variety of applications contains - among others - the wide field of surface modifications, light sources, steriliztation and display panels.
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