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In this study, ZnO thin films were fabricated on a Pt(111)/TiOx/SiO2/Si substrate using the RF magnetron sputtering method. Then, the effect of the crystallization orientation and microstructure on the piezoelectric and optical properties of the ZnO thin film was investigated for various O2/(Ar+O2) gas ratios. When the O2/(Ar+O2) gas ratio was 50%, the intensity of the (002) peak corresponding to...
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