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The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82 with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216kg/cm 2 .
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