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A z-cut LiNbO 3 crystal was immersed in a molten benzoic acid for 10min and then was implanted with 6-MeV oxygen ions at a fluence of 6×10 14 ions/cm 2 . Lattice damage in this crystal was measured by a Rutherford backscattering and channeling technique and was compared with lattice damage in a proton-exchanged LiNbO 3 crystal and an oxygen-ion-implanted LiNbO 3...
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