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We investigated the optimal deposition conditions of a thin indium tin oxide (ITO) film on an amorphous silicon (a-Si) single-junction solar cell using pulsed DC magnetron sputtering. Thin ITO films were deposited while power, deposition time, pressure, gas flow and temperature were varied to find such conditions. The efficiency of a-Si solar cells with ITO films was 6.65% at the optimal conditions...
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