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TiO2 Thin films were deposited by RF magnetron sputtering on silicon dioxide substrates and irradiated using a KrF excimer laser. The effect of laser energy on the film has been systemically investigated by X-ray diffractometry, Raman spectral, X-ray photoelectron spectroscopy, and scanning electron microscopy. When the laser fluence was not higher than 0.3J/cm2, an obvious thermal effect of laser...
TiO 2 films with high crystallinity and good stoichiometry were prepared by magnetron sputtering technique under the optimized process conditions and analyzed by various characterization methods. Metal-semiconductor-metal (MSM) structure detectors with diverse finger spacings were then fabricated on the TiO 2 films by employing Au as the Schottky contact metal. Low dark current, large...
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