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This paper reports the design, fabrication, and characterization of piezoelectric quartz MEMS magnetometers based on acoustic coupling between resonance modes. The magnetic sensors described herein employ a novel transduction scheme to upconvert the desired near-DC magnetic field signal (using the fundamental flexural mode) onto frequency modulated (FM) sidebands of the primary quartz thickness shear...
Stable local oscillators with low phase noise are extremely important elements in high performance communication and navigation systems. We present the development of compact UHF-band frequency sources capable of maintaining low phase noise for handheld portable systems. We also explored nonlinearity in MEMS resonators and attempted to use nonlinear dynamics to enhance phase noise performance. Using...
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