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The nanostructure of hydrogenated amorphous silicon (a-Si:H) is studied by means of doppler broadening positron annihilation spectroscopy (DB-PAS) and Fourier transform infrared (FTIR) spectroscopy. The evolution of open volume deficiencies is monitored during annealing, demonstrating that small vacancies and other small vacancy clusters that are initially present in the a-Si:H nanostructure agglomerate...
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