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An alternative to conventional CMP termed “pad-in-a-bottle” (PIB) polishing is reported, in which the polyurethane polishing pad is replaced by a stiff polycarbonate counterface, and polyurethane beads 10–50 µm in diameter are used in conjunction with slurry and slurry particles to achieve planarization. Blanket oxide wafer PIB experiments demonstrate effective oxide removal. Patterned wafer PIB experiments...
In this study, a novel slurry injection system (SIS) is introduced. SIS is placed on top of the pad which conformally rides on the pad surface during polishing and presents a thin and uniform slurry film to the wafer. Examples of SIS installed on various 200 and 300 mm commercial polishers are shown. Removal rate and polishing defects are compared between SIS and the conventional pad center area slurry...
Workforce scheduling has become increasingly important for both the public sector and private companies. Optimized shifts and rosters lower costs, utilize resources more effectively and ensure fairer workloads and distribution of shifts. This paper presents our work with workforce scheduling in bus transit companies. We present the workforce scheduling process in these companies and give an example...
While personal health record service is to be shifted to cloud computing, successful factors can be security and privacy protection and service efficiency. In this study, we propose a framework coherently employing the symmetric key cryptography and identity-based cryptography that offers a secured, private and full access control of relevant data to the owners of the personal health records, without...
An existing 300 mm CMP tool has been modified to polish 450 mm wafers in order to demonstrate experimentally whether any differences exist in the tribological and thermal characteristics of the two processes, and from that, to infer whether one can expect any removal rate differences between the two systems. Results suggest that, within the ranges of parameter investigated, the two systems behave...
An empirical analysis is employed to study interprovincial changing of returns to education in China and its influencing factors by the database of "Synthesis Investigation of Living Status for Residents in Urban and Rural Regions (2005)" in CGSS and a regressive technology of Hierarchical liner model, the followed results are approved: returns to education in China has surpass mean level...
In this study, differentially expression genes were isolated from a indica rice cultivar Zhong156 with a race-specific blast resistance gene subjected to the avirulent race ZC15 and the virulent race ZB1 of Magnaporthe grisea at the seedling growth stage. Twenty-five cDNA clones were isolated by using suppression subtractive hybridization combined with reverse Northern blot and confirmed by RT-PCR...
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