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The applicability of internal additives for mass scale calibration in time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) was studied. Relation between the ions selected for mass scale calibration and the relative mass accuracy of the target molecular ions was investigated. Didecyldimethylammonium bromide (dC10DMA+Br−), dioctadecyldimethylammonium chloride (dC18DMA+Cl−) and tetradecyltrimethylammonium...
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