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Single crystal thin films of the PZT-based ternary perovskite, xPb(Mn,Nb)O3-(1-x)PZT, were fabricated by a magnetron sputtering on (001)MgO substrates. The sputtered thin films were quenched in air after the deposition. The PZT-based thin films exhibited the hard ferroelectric behavior with high piezoelectric coupling factors kt, kt=70%, measured at GHz range FBAR structure. The PZT-based thin films...
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