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This paper reports on the implementation of an ultraminiature 140 MHz narrowband filter based on aluminum nitride Lamb wave resonators. Monolithically integrated with a pair of on-chip capacitors and cascaded with a pair of inductors, the filter is well matched to 50 ohm, showing a remarkably high performance. A low pass-band insertion loss of 2.78 dB and steep filter skirts are achieved. The form...
In this paper, we report experimental results on band-pass aluminum nitride (AlN) MEMS filters that are based on Lamb wave resonators (LWRs) which exhibit a high ratio of the resistance at parallel resonance (Rp) to the resistance at series resonance (Rs). One-port LWRs working at S0 mode with various geometry dimensions are analyzed and the design guidelines for LWRs with high performance are reported...
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