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In this paper, we show the process and integration results of small TSVs integrated by 300mm 3DIC BTSV process. The TSV size is from 2um to 3um (in diameter) with aspect ratio of 10. The achievements of this work are: 1) successful demonstration of 20um thin wafer process by ITRI's 300mm wafer thinning process; 2) 2∼3um TSV patterning and etching performed by backside TSV process; 3) Combination of...
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