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For the first time, a novel smart biosensor with hybrid sensor/memory/CMOS poly-Si nanowire technology has been developed. Special designed oxide-nitride-oxide composite dielectric underneath 50nm nanowire realizes an electrically Vth-adjustable sensor to compensate device variation. The detections of pH, hydrogen peroxide and DNA are demonstrated using various functionalized receptors. A substrate-ionic...
Device characteristics of the nanowire FETs with nonideal gate structures, such as nonuniform gate oxide and elliptic wire, are investigated using 3D numerical simulation. As the nonideal nanowire cases show acceptable device characteristics and still maintain good performance projection, various nanowires FETs are thus flexible for manufacturing. By simply changing the wire diameter from 10 nm to...
Record area size of 0.039 μm2 for a functional 6T-SRAM cell has been successfully achieved with a novel Nano Injection Lithography (NIL) technique and dynamic Vdd regulator (DVR). The NIL technique is not only maskless for minimizing entry cost but also photoresist free to greatly enhance pattern resolution, down to 2 nm 3-sigma line width roughness, and without significant proximity effect. Devices...
Optimal design for nanowire FETs beyond 22 nm technology node is presented using numerical 3D simulation and physical analysis. Our results suggest that design optimization associated with the wire diameter could achieve performance benefits in the nanowire FET technologies. Small wire diameter is not necessary for performance, though it favors device scaling.
An analytical terahertz (THz) detection model of the Silicon nanowire MOSFET (NWFET) is developed in this paper. Beginning from the fundamental hydrodynamic transport equations, the expressions of the velocity spatial distribution and inversion charge transport are obtained. Under the reasonable boundary, an analytical model of the photoresponse of the NWFET is derived out. The comparison between...
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