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The design, fabrication and test of a novel MEMS inclinometer were described. This inclinometer was based on the piezoresistive detection method, and was fabricated by SOI process. The micro-structure of the inclinometer was a four vertical cantilever beams, a center mass with a rigid cylinder fixed on it. The piezoresistors fabricated on the beams were used to detect the deformation of the cantilevers...
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