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This paper reports the fabrication method and humidity sensing performances of zinc oxide nanorods (ZONRs) and chitosan self-assembled monolayers (SAMs) modified ZONRs patterned piezoresistive silicon MEMS microcantilevers. The self-actuating and self-sensing microcantilevers were fabricated using standard silicon wafers and bulk-micromachining techniques; a p-diffused heating resistor was patterned...
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