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This paper reports a monolithic CMOS MEMS inertial measurement unit (IMU), which is composed of a 3-axis accelerometer, a Z-axis and a lateral-axis gyroscope. The IMU is integrated with interface circuits on a 5×5mm2 foundry CMOS chip and fabricated with an improved DRIE post-CMOS bulk micromachining process. The new process incorporates a metal deposition to provide a thermal path for...
A novel comb capacitor, the fixed and movable fingers of which have different positions but the same height, is proposed. The comb capacitor can be used to measure out-of-plane movement through differential method and has low air damping. Using this kind of comb capacitor, a bulk micromachined y-axis gyroscope is designed, whose structure is doubly decoupled. The gyroscope is fabricated by silicon/glass...
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