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Precision positioning actuators with high speed motion are demanded in the field of manufacturing inspections for semiconductor and flat display areas, and so on. The authors called “Nano-Motion Actuator (NMA)” which consisted of a displacement-amplifying mechanism and a stacked piezoelectric element [1]. However, its first resonance frequency became limited by displacement amplification. We proposed...
In this research, we examined an adaptive control method to suppress overshooting in a precise positioning device with a damper composed of a visco-elastic material and a constrained plate. A two-degrees-of-freedom control system was adopted with conditions, to shape the response characteristics of the desired response using feedforward controller. Moreover, by using a feedback controller to inhibit...
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