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A polymer-silica hybrid 2×2 thermo-optic switch is demonstrated. The top cladding and core layer are composed of polymers, while the bottom cladding is made of silica. Since polymer and silica have opposite signs of thermo-optic coefficients, the change of the refractive index of the core is opposite to that of the bottom cladding as the temperature increased. With the finite difference beam propagation...
Digital lithography technique is a promising tool for the fabrication of binary optical element. In this paper, we present the mask-division technique to improve the lithography quality. A piece of high-frequency mask is divided into several pieces of low-frequency binary masks. Then they are imaged on the photoresist successively by using the DMD-based lithography system. Based on the theory of partial...
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