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This paper addresses the control problem of extending the travel range of a MEMS electrostatic actuator through a closed-loop voltage control scheme. Since the electrostatic actuator is inherently unstable due to its pull-in limit, one of the major control goals is to stabilize the actuator system beyond the limit. In addition, the controller has to be robust against external disturbances and noise...
The paper presents a novel oscillation controller for controlling the driving mode (or drive axis) of a vibrational gyroscope to oscillate at a desired trajectory. The controller consists of a PD controller and an online extended state observer (ESO). The ESO is used to estimate the system states and the discrepancy between the real system and the mathematical model of the gyroscope. The PD controller...
This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and quadrature...
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