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A new control method is presented to drive the drive axis of a Micro-Electro-Mechanical Systems (MEMS) gyroscope to resonance and to regulate the output amplitude of the axis to a fixed level. It is based on a unique active disturbance rejection control (ADRC) strategy, which actively estimates and compensates for internal dynamic changes of the drive axis and external disturbances in real time. The...
This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and quadrature...
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