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The detailed defects and interface in the ZnO films on (112̄0)a-plane of sapphire have been characterized using transmission electron microscopy. The single crystal ZnO films are grown by electron cyclotron resonance-assisted molecular beam epitaxy. The orientation relationship between ZnO films and sapphire is (0001)ZnO∥(112̄0)sapphire and [21̄1̄0]ZnO∥[0001]sapphire. A majority of the threading dislocations...
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