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A vibration suppression method using switching control is proposed for smooth motion control of SCARA robot in wafer transition. The wafer robot is composed of joints integrated with magenetorhelogical damper. Vibration often occurs when acceleration jump abruptly, especially in the end of operation period. The residual vibration decreases the safety of wafer operation and extends the settling time...
For smooth operation of SCARA robot for wafer transition, a new method using magenetorhelogical damper for vibration suppression is proposed. Vibration often occurs when the acceleration decrease or increase abruptly. Especially in the end of an operation period, the residual vibration decreases the safety of wafer operation and extends settling time. Firstly, Vibration sources are analyzed. And dynamics...
This paper is concerned with the robust tracking control of an electrically driven free-floating space manipulator with internal parameter uncertainty and external disturbance. An adaptive disturbance-observer-based output feedback control is employed to provide a solution to the control problem, wherein the parameters are tuned online by using fuzzy logic systems to compensate for equivalent disturbance,...
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