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A gold coated silicon mirror (5 mm × 5mm) actuated by piezoelectric Pb(Zr, Ti)O3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with 5μm thick Si device layer, with multi-layers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and a 1×10 arrayed PZT cantilevers arranged in parallel...
A gold-coated silicon mirror (5 mm × 5 mm) driven by a piezoelectric Pb(Zr,Ti)O3 (PZT) beam with 1 × 10 cantilever actuators has been demonstrated for variable optical attenuator application. A dual-core-fiber collimator is aligned perpendicularly to the mirror in a three-dimensional light attenuation arrangement. Torsional attenuation based on the difference in the dc biasing voltage applied to the...
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