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In precision motion control systems, the two degree of freedom (2-DOF) control structure is widely utilized for improving tracking performance. Although ideally the 2-DOF control can be designed to yield zero tracking error, the practical performance is often deteriorated due to disturbances. In some cases, the disturbances can be measured or estimated and then compensated by modifying the control...
Low-cost, indirect-drive actuators, like timing belts are widely used in many industrial applications requiring linear translational motion. However, the timing belt faces greater control challenges as newer technological processes necessitate an increased tracking accuracy, precision and a need for minimal vibration all in the presence of rapid payload changes. Firstly, it is widely known that belt...
Lightweight stages are becoming the new trend in industrial high performance motion systems. In many front-end semiconductor equipments, feedforward control is widely used to improve tracking accuracy of motion systems. On the other hand, in most back-end semiconductor applications, the low frequency disturbance is more significant and it needs to be compensated effectively in order for the feedforward...
Lightweight stages are becoming the new trend in industrial high performance motion systems. They are generally less stiff than the traditional designs and more pronounced resonant dynamics usually appear in low frequency region. Control design methods to deal with these flexible modes effectively are known as the Beyond Rigid Body (BRB) control. In high performance tracking control, such as wafer...
Jerk derivative feedforward control is proposed and used in recent literatures. However, such feedforward control scheme is restricted to the minimum-phase system which has constrained static gains in the flexible modes. This paper presents a novel form of feedforward controller for a wider class of flexible motion systems, even to be non-minimum phase, as long as the summation of DC gains of flexible...
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