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We demonstrate the assisted-heating for ultrasonic nanoimprint lithography (U-NIL) to solve the problem of ultrasonic vibrations only apply to the interface between the convexity of the mold and the polymer, which the heat from ultrasonic vibrations is unable to be transferred into the cavity in time. Using poly(ethylene terephthalate) (PET) as imprinted polymer, we have compared imprinted results...
The effects of mold geometries and imprinted resist thickness on the polymer flow using numerical simulations during nanoimprint lithography is investigated. The velocity fields, including the lateral and vertical velocity, is studied to describe the mode of the polymer deformation, which is the key role to determine the mechanism of nanoimprint forming.
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