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The ultrasonic nanoimprint lithography (U-NIL) was proposed to overcome the drawbacks of long process time comparing with conventional NIL methods. However, the impacts of mold material and pattern size have not been systematically investigated for U-NIL. Therefore, it is necessary to study on the optimum process parameters to get good replicated structures during imprinting process. In this paper,...
A Blue-ray Disc (BD) player, back-end SoC supporting multiple protection, video and display formats is fabricated in a 90 nm 1P7M CMOS process with a core area of 62.95 mm2. This SoC adopts a general copy protection (GCP) unit to integrate various kinds of protection algorithms (e.g. AES, CSS, CPPM/CPRM, DES, SHA-1/MD5), designs a dedicated memory management unit (MMU) for realizing multiple video...
We demonstrate the assisted-heating for ultrasonic nanoimprint lithography (U-NIL) to solve the problem of ultrasonic vibrations only apply to the interface between the convexity of the mold and the polymer, which the heat from ultrasonic vibrations is unable to be transferred into the cavity in time. Using poly(ethylene terephthalate) (PET) as imprinted polymer, we have compared imprinted results...
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