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Novel microcavity plasma jet devices operating at atmospheric gas pressure have been fabricated in a flexible, robust and optically transparent polymer. By a micromolding process, large scale arrays of microcavities, each having a diameter of hundreds of microns and embedded electrodes, have been fabricated with various form factors that can be precisely controlled.
Arrays of low temperature microchannel plasmas have been demonstrated to be an efficient generator of ozone in an atmospheric pressure environment.1 An on-chip chemical reactor was fabricated from Al foil by a sequence of electrochemical processes and micropowder abrasion techniques. Having a thickness of ∼ 1 mm, arrays of parallel microchannels can be stacked to yield increasing throughput. The Al/Al...
Plasma propagation in a microplasma channel having the form of a spiral has been studied in the rare gases and gas mixtures. Microchannels having widths of 200–300 µm, and a length-to - width aspect ratio of ∼103∶1, have been fabricated in nanoporous Al2O3 by a sequence of wet chemical and micropowder machining processes, Produced from 125–250 µm thick aluminum foil, these channels are situated in...
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